发明授权
US07985959B2 Self-aligned vertical bipolar junction transistor for phase change memories 有权
用于相变存储器的自对准垂直双极结型晶体管

Self-aligned vertical bipolar junction transistor for phase change memories
摘要:
A phase change memory may include self-aligned polysilicon vertical bipolar junction transistors used as select devices. The bipolar junction transistors may be formed with double shallow trench isolation. For example, the emitters of each bipolar transistor may be defined by a first set of parallel trenches in one direction and a second set of parallel trenches in the opposite direction. In some embodiments, the formation of parasitic PNP transistors between adjacent emitters may be avoided.
信息查询
0/0