Invention Grant
US07988874B2 Method of fabricating semiconductor device and synchronous pulse plasma etching equipment for the same 有权
制造半导体器件和同步脉冲等离子体蚀刻设备的方法

Method of fabricating semiconductor device and synchronous pulse plasma etching equipment for the same
Abstract:
Provided are a method of fabricating a semiconductor device and synchronous pulse plasma etching equipment for the same. The method includes outputting a first radio frequency (RF) power and a control signal and outputting a second RF power. The first RF power is pulse-width modulated to have a first frequency and a first duty ratio, and is applied to a first electrode in a plasma etching chamber. The control signal includes information on a phase of the first RF power. The second RF power is pulse-width modulated to have the first frequency and a second duty ratio smaller than the first duty ratio, is applied to a corresponding second electrode among second electrodes in the plasma etching chamber, and is supplied for a time section in which the first RF power is supplied.
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