Invention Grant
- Patent Title: Method of fabricating semiconductor device and synchronous pulse plasma etching equipment for the same
- Patent Title (中): 制造半导体器件和同步脉冲等离子体蚀刻设备的方法
-
Application No.: US12913965Application Date: 2010-10-28
-
Publication No.: US07988874B2Publication Date: 2011-08-02
- Inventor: Jeong-Yun Lee , Ken Tokashiki , Kyoung-Sub Shin , Jun-Ho Yoon , Hong Cho
- Applicant: Jeong-Yun Lee , Ken Tokashiki , Kyoung-Sub Shin , Jun-Ho Yoon , Hong Cho
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2009-0124210 20091214
- Main IPC: C03C15/00
- IPC: C03C15/00 ; C03C25/68 ; H01L21/302 ; H01L21/461

Abstract:
Provided are a method of fabricating a semiconductor device and synchronous pulse plasma etching equipment for the same. The method includes outputting a first radio frequency (RF) power and a control signal and outputting a second RF power. The first RF power is pulse-width modulated to have a first frequency and a first duty ratio, and is applied to a first electrode in a plasma etching chamber. The control signal includes information on a phase of the first RF power. The second RF power is pulse-width modulated to have the first frequency and a second duty ratio smaller than the first duty ratio, is applied to a corresponding second electrode among second electrodes in the plasma etching chamber, and is supplied for a time section in which the first RF power is supplied.
Public/Granted literature
- US20110143537A1 METHOD OF FABRICATING SEMICONDUCTOR DEVICE AND SYNCHRONOUS PULSE PLASMA ETCHING EQUIPMENT FOR THE SAME Public/Granted day:2011-06-16
Information query