发明授权
- 专利标题： Antireflective coating composition
- 专利标题（中）： 防反射涂料组合物
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申请号： US12060307申请日： 2008-04-01
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公开(公告)号： US07989144B2公开(公告)日： 2011-08-02
- 发明人: M. Dalil Rahman , David Abdallah , Rhuzi Zhang , Douglas McKenzie
- 申请人： M. Dalil Rahman , David Abdallah , Rhuzi Zhang , Douglas McKenzie
- 申请人地址： US NJ Somerville
- 专利权人： AZ Electronic Materials USA Corp
- 当前专利权人： AZ Electronic Materials USA Corp
- 当前专利权人地址： US NJ Somerville
- 代理商 Sangya Jain
- 主分类号： G03F7/11
- IPC分类号： G03F7/11 ; G03F7/30 ; B29C59/16 ; C08F291/02
摘要：
The present invention relates to an antireflective composition comprising a thermal acid generator and an epoxy polymer comprising at least one unit of structure 1, at least one unit of structure 2, where, R1 to R12 are independently selected from hydrogen and C1-C4 alkyl, structure 1 has a configuration selected from cis, trans or mixture thereof, and x and y are the mole % of the monomeric units in the polymer. The invention also relates to a process for manufacturing a microelectronic device.
公开/授权文献
- US20090246691A1 Antireflective Coating Composition 公开/授权日：2009-10-01