Invention Grant
- Patent Title: Semiconductor structure including gate electrode having laterally variable work function
- Patent Title (中): 半导体结构包括具有横向可变功函数的栅电极
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Application No.: US12544452Application Date: 2009-08-20
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Publication No.: US07989900B2Publication Date: 2011-08-02
- Inventor: Wilfried Haensch , Steven Koester , Amlan Majumdat
- Applicant: Wilfried Haensch , Steven Koester , Amlan Majumdat
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
A semiconductor structure, such as a CMOS structure, includes a gate electrode that has a laterally variable work function. The gate electrode that has the laterally variable work function may be formed using an angled ion implantation method or a sequential layering method. The gate electrode that has the laterally variable work function provides enhanced electrical performance within an undoped channel field effect transistor device.
Public/Granted literature
- US20090309148A1 SEMICONDUCTOR STRUCTURE INCLUDING GATE ELECTRODE HAVING LATERALLY VARIABLE WORK FUNCTION Public/Granted day:2009-12-17
Information query
IPC分类: