发明授权
- 专利标题: Silicon package with embedded oscillator
- 专利标题(中): 硅封装带嵌入式振荡器
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申请号: US11698480申请日: 2007-01-25
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公开(公告)号: US07990025B1公开(公告)日: 2011-08-02
- 发明人: Pablo Ferreiro , Kenneth Martin , John Cline
- 申请人: Pablo Ferreiro , Kenneth Martin , John Cline
- 代理商 Richard K Thomson
- 主分类号: H01L41/053
- IPC分类号: H01L41/053
摘要:
A hermetic package for electronic components which is made of metallic silicon is disclosed. The package includes a plurality of silicon elements which are bonded together. In the first embodiment, a cavity is hollowed out in the cover to house the Application Specific Integrated Circuit oscillator and the resonator. In a second embodiment, the cavity is formed in the base member with a plurality of pedestal shelves to hold the resonator above and out of contact with the electrical circuitry for the oscillator and thermal controls.
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