发明授权
- 专利标题: Method of manufacturing display unit
- 专利标题(中): 显示单元制造方法
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申请号: US12015534申请日: 2008-01-17
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公开(公告)号: US07993179B2公开(公告)日: 2011-08-09
- 发明人: Seiji Ishikawa , Jun Ooida , Yoshinori Muramatsu , Takahiro Miyazaki
- 申请人: Seiji Ishikawa , Jun Ooida , Yoshinori Muramatsu , Takahiro Miyazaki
- 申请人地址: JP Chiba
- 专利权人: Hitachi Displays, Ltd.
- 当前专利权人: Hitachi Displays, Ltd.
- 当前专利权人地址: JP Chiba
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2007-013805 20070124
- 主分类号: H01J9/24
- IPC分类号: H01J9/24
摘要:
An exposure method that suppresses distribution of pattern shapes at the time of exposure.In a manufacturing method for a display unit, a layer forming a reference for pattern arrangement is determined among layers formed on a panel. An arrangement of a pattern in a layer above the reference layer is determined using a value obtained from distribution of the pattern arrangement in the reference layer.
公开/授权文献
- US20080176478A1 METHOD OF MANUFACTURING DISPLAY UNIT 公开/授权日:2008-07-24
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