发明授权
US07993179B2 Method of manufacturing display unit 有权
显示单元制造方法

Method of manufacturing display unit
摘要:
An exposure method that suppresses distribution of pattern shapes at the time of exposure.In a manufacturing method for a display unit, a layer forming a reference for pattern arrangement is determined among layers formed on a panel. An arrangement of a pattern in a layer above the reference layer is determined using a value obtained from distribution of the pattern arrangement in the reference layer.
公开/授权文献
信息查询
0/0