Invention Grant
US07993506B2 Gas sensor 有权
气体传感器

Gas sensor
Abstract:
There is provided a gas sensor, including a gas sensing film formed of an oxide semiconductor material and a gas-permeable protection layer formed of oxide particles and arranged on the gas sensing film. The oxide particles of the protection layer have an average particle size of 500 nm or smaller.
Public/Granted literature
Information query
Patent Agency Ranking
0/0