发明授权
- 专利标题: Bumped chip package fabrication method and structure
- 专利标题(中): 凸起芯片封装制造方法和结构
-
申请号: US12555449申请日: 2009-09-08
-
公开(公告)号: US07994045B1公开(公告)日: 2011-08-09
- 发明人: Ronald Patrick Huemoeller , Rex Anderson , Ravi Kiran Chilukuri
- 申请人: Ronald Patrick Huemoeller , Rex Anderson , Ravi Kiran Chilukuri
- 申请人地址: US AZ Chandler
- 专利权人: Amkor Technology, Inc.
- 当前专利权人: Amkor Technology, Inc.
- 当前专利权人地址: US AZ Chandler
- 代理机构: Gunnison, McKay & Hodgson, L.L.P.
- 代理商 Serge J. Hodgson
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A method of fabricating a bumped chip package includes forming a first seed layer on a dielectric layer, the dielectric layer comprising a dielectric layer opening exposing a substrate terminal of a substrate, the first seed layer being formed within the dielectric layer opening and on the substrate terminal. A circuit pattern is plated on the first seed layer, wherein an exposed portion of the first seed layer is exposed from the circuit pattern. The exposed portion of the first seed layer is removed by laser-ablation. By using a laser-ablation process, a chemical etching process is avoided thus eliminating the need to treat or dispose of chemical etching hazardous waste. Further, circuit pattern width erosion and undercut of the circuit pattern associated with a chemical etching process are avoided.
信息查询
IPC分类: