发明授权
- 专利标题: Thin film field-effect transistor and display using the same
- 专利标题(中): 薄膜场效应晶体管和显示器使用相同
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申请号: US12545885申请日: 2009-08-24
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公开(公告)号: US07994579B2公开(公告)日: 2011-08-09
- 发明人: Yuichiro Itai
- 申请人: Yuichiro Itai
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Solaris Intellectual Property Group, PLLC
- 优先权: JP2008-231101 20080909
- 主分类号: H01L29/12
- IPC分类号: H01L29/12
摘要:
The present invention provides a thin film field-effect transistor comprising a substrate having thereon at least a gate electrode, a gate insulating film, an active layer, a source electrode, and a drain electrode, wherein the active layer is an oxide semiconductor layer, a resistance layer having an electric conductivity that is lower than an electric conductivity of the active layer is provided between the active layer and at least one of the source electrode or the drain electrode, and an intermediate layer comprising an oxide comprising an element having a stronger bonding force with respect to oxygen than that of the oxide semiconductor in the active layer is provided between the active layer and the resistance layer.
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