发明授权
US08000008B2 Optical device with controllable deflection element for vibration compensation 有权
具有用于振动补偿的可控偏转元件的光学装置

Optical device with controllable deflection element for vibration compensation
摘要:
An optical device, in particular a microscope (1), that includes a beam path in which is arranged at least one deflection element (5, 6a to 6f) for deflecting the beam path, at least one vibration sensor (34) being arranged in or on the optical device; at least one of the deflection elements (5, 6a to 6f) including a mirror having a controllably deformable mirror surface (50); and a control unit (32) being provided that, as a function of the output signal of the vibration sensor (34), applies control to the at least one deflection element (5, 6a to 6f) in order to adjust the mirror surface (50) in such a way that vibrations of the optical device are compensated for by a correspondingly opposite-phase adjustment of the mirror surface (50).
公开/授权文献
信息查询
0/0