发明授权
US08000008B2 Optical device with controllable deflection element for vibration compensation
有权
具有用于振动补偿的可控偏转元件的光学装置
- 专利标题: Optical device with controllable deflection element for vibration compensation
- 专利标题(中): 具有用于振动补偿的可控偏转元件的光学装置
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申请号: US12113237申请日: 2008-05-01
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公开(公告)号: US08000008B2公开(公告)日: 2011-08-16
- 发明人: Ulrich Sander
- 申请人: Ulrich Sander
- 申请人地址: SG Singapore
- 专利权人: Leica Instruments (Singapore) Pte. Ltd.
- 当前专利权人: Leica Instruments (Singapore) Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Hodgson Russ LLP
- 优先权: DE102007021981 20070510
- 主分类号: G02B27/64
- IPC分类号: G02B27/64
摘要:
An optical device, in particular a microscope (1), that includes a beam path in which is arranged at least one deflection element (5, 6a to 6f) for deflecting the beam path, at least one vibration sensor (34) being arranged in or on the optical device; at least one of the deflection elements (5, 6a to 6f) including a mirror having a controllably deformable mirror surface (50); and a control unit (32) being provided that, as a function of the output signal of the vibration sensor (34), applies control to the at least one deflection element (5, 6a to 6f) in order to adjust the mirror surface (50) in such a way that vibrations of the optical device are compensated for by a correspondingly opposite-phase adjustment of the mirror surface (50).
公开/授权文献
- US20080278781A1 Optical Device With Vibration Compensation 公开/授权日:2008-11-13
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