发明授权
- 专利标题: Method of manufacturing magnetic recording medium and magnetic recording medium
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申请号: US12544606申请日: 2009-08-20
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公开(公告)号: US08002997B2公开(公告)日: 2011-08-23
- 发明人: Yoshiyuki Kamata , Kaori Kimura , Yousuke Isowaki , Masatoshi Sakurai
- 申请人: Yoshiyuki Kamata , Kaori Kimura , Yousuke Isowaki , Masatoshi Sakurai
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Knobbe, Martens, Olson & Bear LLP
- 优先权: JP2008-213674 20080822
- 主分类号: B44C1/22
- IPC分类号: B44C1/22
摘要:
According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
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