发明授权
US08003424B2 Method for fabricating CMOS image sensor with pocket photodiode for minimizng image lag 失效
用于制造具有袖珍光电二极管的CMOS图像传感器以最小化图像滞后的方法

Method for fabricating CMOS image sensor with pocket photodiode for minimizng image lag
摘要:
A CMOS image sensor includes a photosensitive device, a floating diffusion region, a transfer transistor, and a pocket photodiode formed in a semiconductor substrate of a first conductivity type. The floating diffusion region is of a second conductivity type. The transfer transistor has a channel region disposed between the photosensitive device and the floating diffusion region. The pocket photodiode is of the second conductivity type and is formed under a first portion of a bottom surface of the channel region such that a second portion of the bottom surface of the channel region abuts the semiconductor substrate.
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