发明授权
US08003424B2 Method for fabricating CMOS image sensor with pocket photodiode for minimizng image lag
失效
用于制造具有袖珍光电二极管的CMOS图像传感器以最小化图像滞后的方法
- 专利标题: Method for fabricating CMOS image sensor with pocket photodiode for minimizng image lag
- 专利标题(中): 用于制造具有袖珍光电二极管的CMOS图像传感器以最小化图像滞后的方法
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申请号: US11983913申请日: 2007-11-13
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公开(公告)号: US08003424B2公开(公告)日: 2011-08-23
- 发明人: Kyung-Ho Lee , Yi-Tae Kim , Jung-Chak Ahn , Sae-Young Kim
- 申请人: Kyung-Ho Lee , Yi-Tae Kim , Jung-Chak Ahn , Sae-Young Kim
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理商 Monica H. Choi
- 优先权: KR10-2007-0009310 20070130
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A CMOS image sensor includes a photosensitive device, a floating diffusion region, a transfer transistor, and a pocket photodiode formed in a semiconductor substrate of a first conductivity type. The floating diffusion region is of a second conductivity type. The transfer transistor has a channel region disposed between the photosensitive device and the floating diffusion region. The pocket photodiode is of the second conductivity type and is formed under a first portion of a bottom surface of the channel region such that a second portion of the bottom surface of the channel region abuts the semiconductor substrate.
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