发明授权
US08007631B2 System and method for imprint lithography to facilitate dual damascene integration with two imprint acts
有权
用于压印光刻的系统和方法,以促进双重镶嵌与两个印记动作的整合
- 专利标题: System and method for imprint lithography to facilitate dual damascene integration with two imprint acts
- 专利标题(中): 用于压印光刻的系统和方法,以促进双重镶嵌与两个印记动作的整合
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申请号: US11741991申请日: 2007-04-30
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公开(公告)号: US08007631B2公开(公告)日: 2011-08-30
- 发明人: Srikanteswara Dakshina-Murthy , Bhanwar Singh , Ramkumar Subramanian
- 申请人: Srikanteswara Dakshina-Murthy , Bhanwar Singh , Ramkumar Subramanian
- 申请人地址: US TX Austin
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Turocy & Watson, LLP
- 主分类号: C23C10/00
- IPC分类号: C23C10/00 ; C29C59/02 ; C03C17/22
摘要:
A system and method are provided to facilitate dual damascene interconnect integration with two imprint acts. The method provides for creation of a pair of translucent imprint molds containing the dual damascene pattern to be imprinted. The first imprint mold of the pair contains the via features of the dual damascene pattern and the second imprint mold of the pair contains the trench features. The via feature imprint mold is brought into contact with a first imaging layer deposited upon a first transfer layer which is deposited upon a dielectric layer of a substrate. The trench feature imprint mold is brought into contact with a second imaging layer deposited upon a second transfer layer which is deposited upon the first imaging layer of the substrate. When each imaging layer is exposed to a source of illumination, it cures with a structure matching the features of the corresponding imprint mold. A sequence of etches transfer and combine the via features from the first imaging layer with the trenches from the second imaging layer to create the dual damascene openings within the dielectric layer.
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