发明授权
- 专利标题: Semiconductor device, manufacturing method thereof, composite metal body and manufacturing method thereof
- 专利标题(中): 半导体装置及其制造方法,复合金属体及其制造方法
-
申请号: US12019789申请日: 2008-01-25
-
公开(公告)号: US08008772B2公开(公告)日: 2011-08-30
- 发明人: Toshiaki Morita , Yusuke Yasuda , Eiichi Ide
- 申请人: Toshiaki Morita , Yusuke Yasuda , Eiichi Ide
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2007-084265 20070328
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A semiconductor device having a structure in which a semiconductor element and a Cu or Ni electrode are connected by way of a bonding layer comprising Cu, and the Cu bonding layer and the Cu or Ni electrode are diffusion-bonded to each other. The bonding layer is formed by conducting bonding in a reducing atmosphere by using a bonding material containing particles of Cu oxide with an average particle size of 1 nm to 50 μm and a reducing agent comprising an organic material, thereby providing excellent bonding strength to Ni or Cu electrode.
公开/授权文献
信息查询
IPC分类: