Invention Grant
- Patent Title: Semiconductor device, manufacturing method thereof, composite metal body and manufacturing method thereof
- Patent Title (中): 半导体装置及其制造方法,复合金属体及其制造方法
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Application No.: US12019789Application Date: 2008-01-25
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Publication No.: US08008772B2Publication Date: 2011-08-30
- Inventor: Toshiaki Morita , Yusuke Yasuda , Eiichi Ide
- Applicant: Toshiaki Morita , Yusuke Yasuda , Eiichi Ide
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2007-084265 20070328
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor device having a structure in which a semiconductor element and a Cu or Ni electrode are connected by way of a bonding layer comprising Cu, and the Cu bonding layer and the Cu or Ni electrode are diffusion-bonded to each other. The bonding layer is formed by conducting bonding in a reducing atmosphere by using a bonding material containing particles of Cu oxide with an average particle size of 1 nm to 50 μm and a reducing agent comprising an organic material, thereby providing excellent bonding strength to Ni or Cu electrode.
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