发明授权
- 专利标题: Optical image measuring apparatus
- 专利标题(中): 光学图像测量装置
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申请号: US12086280申请日: 2006-11-07
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公开(公告)号: US08009297B2公开(公告)日: 2011-08-30
- 发明人: Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hisashi Tsukada
- 申请人: Kinpui Chan , Masahiro Akiba , Yasufumi Fukuma , Hisashi Tsukada
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Topcon
- 当前专利权人: Kabushiki Kaisha Topcon
- 当前专利权人地址: JP Tokyo
- 代理机构: Edwards Angell Palmer & Dodge LLP
- 优先权: JP2005-353098 20051207; JP2005-353099 20051207
- 国际申请: PCT/JP2006/322201 WO 20061107
- 国际公布: WO2007/066465 WO 20070614
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
Provided is an optical image measuring apparatus capable of obtaining a high-accuracy image without being influenced by a movement of an object to be measured. Flash light is emitted from a xenon lamp (2) and converted into broad band light by an optical filter (2A). A polarization characteristic of the flash light is converted into linear polarization by a polarizing plate (3). Then, the flash light is divided into signal light (S) and reference light (R) by a half mirror (6). A polarization characteristic of the reference light (R) is converted into circular polarization by a wavelength plate (7). The signal light (S) and the reference light (R) are superimposed on each other by the half mirror (6) to produce interference light (L). A CCD (23) detects interference light having the same characteristic as that of the produced interference light (L). The produced interference light (L) is divided into an S-polarized light component (L1) and a P-polarized light component (L2) by a polarization beam splitter (11). The polarized light components are detected by CCDs (21 and 22). A signal processing section (20) of a computer (30) forms an image of the object to be measured (O) based on detection signals from the CCDs (21, 22, and 23).
公开/授权文献
- US20090153873A1 Optical Image Measuring Apparatus 公开/授权日:2009-06-18
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