发明授权
- 专利标题: Balanced purge slit valve
- 专利标题(中): 平衡吹扫狭缝阀
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申请号: US12244643申请日: 2008-10-02
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公开(公告)号: US08011381B2公开(公告)日: 2011-09-06
- 发明人: Jacob Newman , Douglas H. Burns
- 申请人: Jacob Newman , Douglas H. Burns
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Material, Inc.
- 当前专利权人: Applied Material, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, L.L.P.
- 主分类号: B65D43/14
- IPC分类号: B65D43/14 ; F16K27/00
摘要:
Methods and apparatus for providing a gas to a slit valve opening are provided herein. In one embodiment, a slit valve is described. The slit valve includes a housing having an opening, the opening defined by a plurality of interior sidewalls and sized to allow a substrate to pass therethrough, a door adapted to selectively seal the opening, a gas inlet formed in the housing, and a plurality of nozzles disposed in or on at least one of the plurality of interior sidewalls, each of the plurality of nozzles in fluid communication with the gas inlet and the opening.
公开/授权文献
- US20100084398A1 BALANCED PURGE SLIT VALVE 公开/授权日:2010-04-08
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