Invention Grant
- Patent Title: Monolithically integrated semiconductor materials and devices
- Patent Title (中): 单片集成半导体材料和器件
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Application No.: US11591333Application Date: 2006-11-01
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Publication No.: US08012592B2Publication Date: 2011-09-06
- Inventor: Eugene A. Fitzgerald
- Applicant: Eugene A. Fitzgerald
- Applicant Address: US MA Cambridge
- Assignee: Massachuesetts Institute of Technology
- Current Assignee: Massachuesetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: B32B9/04
- IPC: B32B9/04 ; B32B13/04 ; B32B9/00 ; B32B19/00 ; H01L29/66 ; H01L21/02

Abstract:
Methods and structures for monolithically integrating monocrystalline silicon and monocrystalline non-silicon materials and devices are provided. In one structure, a semiconductor structure includes a silicon substrate and a first monocrystalline semiconductor layer disposed over the silicon substrate, wherein the first monocrystalline semiconductor layer has a lattice constant different from a lattice constant of relaxed silicon. The semiconductor structure further includes an insulating layer disposed over the first monocrystalline semiconductor layer in a first region, a monocrystalline silicon layer disposed over the insulating layer in the first region, and a second monocrystalline semiconductor layer disposed over at least a portion of the first monocrystalline semiconductor layer in a second region and absent from the first region. The second monocrystalline semiconductor layer has a lattice constant different from the lattice constant of relaxed silicon.
Public/Granted literature
- US20070105274A1 Monolithically integrated semiconductor materials and devices Public/Granted day:2007-05-10
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