发明授权
- 专利标题: Monolithically integrated semiconductor materials and devices
- 专利标题(中): 单片集成半导体材料和器件
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申请号: US11591333申请日: 2006-11-01
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公开(公告)号: US08012592B2公开(公告)日: 2011-09-06
- 发明人: Eugene A. Fitzgerald
- 申请人: Eugene A. Fitzgerald
- 申请人地址: US MA Cambridge
- 专利权人: Massachuesetts Institute of Technology
- 当前专利权人: Massachuesetts Institute of Technology
- 当前专利权人地址: US MA Cambridge
- 代理机构: Wolf, Greenfield & Sacks, P.C.
- 主分类号: B32B9/04
- IPC分类号: B32B9/04 ; B32B13/04 ; B32B9/00 ; B32B19/00 ; H01L29/66 ; H01L21/02
摘要:
Methods and structures for monolithically integrating monocrystalline silicon and monocrystalline non-silicon materials and devices are provided. In one structure, a semiconductor structure includes a silicon substrate and a first monocrystalline semiconductor layer disposed over the silicon substrate, wherein the first monocrystalline semiconductor layer has a lattice constant different from a lattice constant of relaxed silicon. The semiconductor structure further includes an insulating layer disposed over the first monocrystalline semiconductor layer in a first region, a monocrystalline silicon layer disposed over the insulating layer in the first region, and a second monocrystalline semiconductor layer disposed over at least a portion of the first monocrystalline semiconductor layer in a second region and absent from the first region. The second monocrystalline semiconductor layer has a lattice constant different from the lattice constant of relaxed silicon.
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