发明授权
- 专利标题: Systems and methods for preparing epitaxially textured polycrystalline films
- 专利标题(中): 制备外延织构化多晶膜的系统和方法
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申请号: US12275720申请日: 2008-11-21
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公开(公告)号: US08012861B2公开(公告)日: 2011-09-06
- 发明人: James S. Im
- 申请人: James S. Im
- 申请人地址: US NY New York
- 专利权人: The Trustees of Columbia University in the City of New York
- 当前专利权人: The Trustees of Columbia University in the City of New York
- 当前专利权人地址: US NY New York
- 代理机构: Wilmer Cutler Pickering Hale and Dorr LLP
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
The disclosed subject matter relates to systems and methods for preparing epitaxially textured polycrystalline films. In one or more embodiments, the method for making a textured thin film includes providing a precursor film on a substrate, the film includes crystal grains having a surface texture and a non-uniform degree of texture throughout the thickness of the film, wherein at least a portion of the this substrate is transparent to laser irradiation; and irradiating the textured precursor film through the substrate using a pulsed laser crystallization technique at least partially melt the film wherein the irradiated film crystallizes upon cooling to form crystal grains having a uniform degree of texture.
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