发明授权
US08012861B2 Systems and methods for preparing epitaxially textured polycrystalline films 有权
制备外延织构化多晶膜的系统和方法

Systems and methods for preparing epitaxially textured polycrystalline films
摘要:
The disclosed subject matter relates to systems and methods for preparing epitaxially textured polycrystalline films. In one or more embodiments, the method for making a textured thin film includes providing a precursor film on a substrate, the film includes crystal grains having a surface texture and a non-uniform degree of texture throughout the thickness of the film, wherein at least a portion of the this substrate is transparent to laser irradiation; and irradiating the textured precursor film through the substrate using a pulsed laser crystallization technique at least partially melt the film wherein the irradiated film crystallizes upon cooling to form crystal grains having a uniform degree of texture.
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