发明授权
US08016940B2 Processing method for organic crystal, processing device for organic crystal, and observing device for organic crystal
有权
有机晶体的加工方法,有机晶体的加工装置以及有机晶体的观察装置
- 专利标题: Processing method for organic crystal, processing device for organic crystal, and observing device for organic crystal
- 专利标题(中): 有机晶体的加工方法,有机晶体的加工装置以及有机晶体的观察装置
-
申请号: US10594375申请日: 2005-03-30
-
公开(公告)号: US08016940B2公开(公告)日: 2011-09-13
- 发明人: Hiroaki Adachi , Hiroshi Kitano
- 申请人: Hiroaki Adachi , Hiroshi Kitano
- 申请人地址: JP Tokyo JP Minoo-shi JP Suita-shi JP Katano-shi JP Suita-shi JP Toyanaka-shi JP Ibaraki-shi
- 专利权人: Nikon Corporation,Hiroaki Adachi,Takatomo Sasaki,Yusuke Mori,Kazufumi Takano,Tsuyoshi Inoue,Hiroyoshi Matsumura
- 当前专利权人: Nikon Corporation,Hiroaki Adachi,Takatomo Sasaki,Yusuke Mori,Kazufumi Takano,Tsuyoshi Inoue,Hiroyoshi Matsumura
- 当前专利权人地址: JP Tokyo JP Minoo-shi JP Suita-shi JP Katano-shi JP Suita-shi JP Toyanaka-shi JP Ibaraki-shi
- 代理机构: Holtz, Holtz, Goodman & Chick, PC
- 优先权: JP2004-105375 20040331; JP2004-158133 20040527
- 国际申请: PCT/JP2005/006695 WO 20050330
- 国际公布: WO2005/095042 WO 20051013
- 主分类号: C30B1/02
- IPC分类号: C30B1/02
摘要:
The short-pulse laser light 9 emitted from the short-pulse laser light source 1 is focused on and caused to irradiate an organic crystal 8 contained in a sample container 6 via a shutter 2, intensity adjusting element 3, irradiation position control mechanism 4, and focusing optical system 5. The sample container 6 is carried on a stage 7, and can be moved in three dimensions along the x axis, y axis and z axis in an x-y-z orthogonal coordinate system with the direction of the optical axis being taken as the z axis; furthermore, the sample container 6 can be rotated about the z axis. Working of the organic crystal 8 is performed by means of short-pulse laser light that is focused on and caused to irradiate the surface of the organic crystal 8. Prior to working, nitrogen is caused to jet onto the sample container 6 by a low-temperature gas jet device C that is a cooling device; consequently, the organic crystal 8 is cooled to −150° C. or below. As a result, it is possible to work the object of working in a fixed state, and to increase the working efficiency by means of the short-pulse laser light that is used.
公开/授权文献
信息查询
IPC分类: