发明授权
- 专利标题： Dynamic adaptive sampling rate for model prediction
- 专利标题（中）： 模型预测的动态自适应采样率
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申请号： US10323530申请日： 2002-12-18
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公开(公告)号： US08017411B2公开(公告)日： 2011-09-13
- 发明人: Thomas J. Sonderman , Alexander J. Pasadyn , Gregory A. Cherry
- 申请人： Thomas J. Sonderman , Alexander J. Pasadyn , Gregory A. Cherry
- 申请人地址： KY Grand Cayman
- 专利权人： GlobalFoundries, Inc.
- 当前专利权人： GlobalFoundries, Inc.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Williams, Morgan & Amerson, P.C.
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A method and an apparatus for dynamically adjusting a sampling rate relating to wafer examination. A process step is performed upon a plurality of workpieces associated with a lot. A sample rate for acquiring metrology data relating to at least one of the processed workpiece is determined. A dynamic sampling rate adjustment process is performed to adaptively modify the sample rate. The dynamic sampling rate adjustment process includes comparing a predicted process outcome and an actual process outcome and modifying the sampling rate based upon the comparison.
公开/授权文献
- US20040121495A1 Dynamic adaptive sampling rate for model prediction 公开/授权日：2004-06-24