Invention Grant
- Patent Title: Field emission array having carbon microstructure and method of manufacturing the same
- Patent Title (中): 具有碳微观结构的场发射阵列及其制造方法
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Application No.: US12450965Application Date: 2008-07-01
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Publication No.: US08017413B2Publication Date: 2011-09-13
- Inventor: Seung Seob Lee , Seok Woo Lee , Jung A Lee
- Applicant: Seung Seob Lee , Seok Woo Lee , Jung A Lee
- Applicant Address: KR Yuseong-gu, Daejeon
- Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee Address: KR Yuseong-gu, Daejeon
- Agency: The Nath Law Group
- Agent Jerald L. Meyer; Sungyeop Chung
- Priority: KR10-2008-0062548 20080630
- International Application: PCT/KR2008/003874 WO 20080701
- International Announcement: WO2010/002046 WO 20100107
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is a method for manufacturing a field emission array with a carbon microstructure. The method includes: a photomask attachment step of attaching a photomask with a pattern groove to one surface of a transparent substrate; a photoresist attachment step of attaching a negative photoresist to one surface of the photomask; an exposure step of irradiating light toward the opposite surface of the transparent substrate from the photomask to cure a portion of the negative photoresist with the light irradiated on the negative photoresist through the pattern groove; a developing step of removing an uncured portion of the negative photoresist while leaving the cured portion of the negative photoresist as a microstructure; a pyrolysis step of heating and carbonizing the microstructure thus obtained; and a cathode attachment step of attaching a voltage-supplying cathode to the surface of the transparent substrate on which the microstructure is formed.
Public/Granted literature
- US20110089396A1 FIELD EMISSION ARRAY HAVING CARBON MICROSTRUCTURE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-04-21
Information query
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