Invention Grant
- Patent Title: Nonvolatile memory devices and methods of fabricating the same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US11704205Application Date: 2007-02-09
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Publication No.: US08017477B2Publication Date: 2011-09-13
- Inventor: Won-joo Kim , Suk-pil Kim , Yoon-dong Park
- Applicant: Won-joo Kim , Suk-pil Kim , Yoon-dong Park
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2006-0071570 20060728
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A nonvolatile memory device includes a plurality of first control gate electrodes, second control gate electrodes, first storage node films, and second storage node films. The first control gate electrodes are recessed into a semiconductor substrate. Each second control gate electrode is disposed between two adjacent first control gate electrodes. The second control gate electrodes are disposed on the semiconductor substrate over the first control gate electrodes. The first storage node films are disposed between the semiconductor substrate and the first control gate electrodes. The second storage node films are disposed between the semiconductor substrate and the second control gate electrodes. A method of fabricating the nonvolatile memory device includes forming the first storage node films, forming the first control gate electrodes, forming the second storage node films, and forming the second control gate electrodes.
Public/Granted literature
- US20080025096A1 Nonvolatile memory devices and methods of fabricating the same Public/Granted day:2008-01-31
Information query
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