发明授权
- 专利标题： Preserving filled features when vacuum wiping
- 专利标题（中）： 真空擦拭时保存充满的功能
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申请号： US12488642申请日： 2009-06-22
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公开(公告)号： US08021594B2公开(公告)日： 2011-09-20
- 发明人: Steven C. Shackleton , Pankaj B. Lad , Ian Matthew McMackin , Frank Y. Xu , Sidlgata V. Sreenivasan
- 申请人： Steven C. Shackleton , Pankaj B. Lad , Ian Matthew McMackin , Frank Y. Xu , Sidlgata V. Sreenivasan
- 申请人地址： US TX Austin
- 专利权人： Molecular Imprints, Inc.
- 当前专利权人： Molecular Imprints, Inc.
- 当前专利权人地址： US TX Austin
- 代理商 Cameron A. King
- 主分类号： B29C35/08
- IPC分类号： B29C35/08 ; B29C59/02
摘要：
A method/process for curing imprint on a template prior to contact with a substrate. A curing process is used to adhere the imprint to a wafer or substrate. Monomer is deposited on a template and then partially cured using a UV exposure. The exposure is controlled so that the imprint is cured past the gel point, but still retains a thin liquid layer of uncured monomer at the surface that will bond with the wafer. Further, this partially cured layer enables the alignment adjustments between the template and the substrate to be performed after contact between the two without pulling any monomer out of the features.
公开/授权文献
- US20090256289A1 Preserving Filled Features When Vacuum Wiping 公开/授权日：2009-10-15
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