Invention Grant
- Patent Title: Method of fabricating an image sensor having an annealing layer
- Patent Title (中): 制造具有退火层的图像传感器的方法
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Application No.: US12320543Application Date: 2009-01-29
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Publication No.: US08021912B2Publication Date: 2011-09-20
- Inventor: Yi Tae Kim , Kyung Ho Lee , Sae-Young Kim , Yun Ho Jang , Jung Chak Ahn
- Applicant: Yi Tae Kim , Kyung Ho Lee , Sae-Young Kim , Yun Ho Jang , Jung Chak Ahn
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2008-0009257 20080129
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing an image sensor is provided. In this method, a photoelectric conversion unit may be formed within a semiconductor substrate, wherein the semiconductor substrate includes an active pixel region and an optical black region. An annealing layer may be formed on the active pixel region and the optical black region and etched so that the annealing layer covers at least a portion of the optical black region. A wiring pattern may be formed on the annealing layer. A light-blocking pattern may be formed on the wiring pattern so as to cover the entire photoelectric conversion unit of the optical black region, thereby blocking light from being incident upon the optical black region.
Public/Granted literature
- US20090209058A1 Method of fabricating image sensor Public/Granted day:2009-08-20
Information query
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