Invention Grant
- Patent Title: Method and apparatus for excimer curing
- Patent Title (中): 准分子固化的方法和装置
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Application No.: US12107281Application Date: 2008-04-22
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Publication No.: US08022377B2Publication Date: 2011-09-20
- Inventor: Dmitry Lubomirsky , Muhammad M. Rasheed , Ellie Y. Yieh
- Applicant: Dmitry Lubomirsky , Muhammad M. Rasheed , Ellie Y. Yieh
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G21G5/00
- IPC: G21G5/00

Abstract:
An apparatus for An apparatus for generating excimer radiation is provided. The apparatus includes a housing having a housing wall. An electrode is configured within the housing. A tubular body is around the electrode. The tubular body includes an outer wall and an inner wall. At least one inert gas is between the outer wall and the inner wall, wherein the housing wall and the electrode are configured to excite the inert gas to illuminate an excimer light for curing.
Public/Granted literature
- US20090261276A1 METHOD AND APPARATUS FOR EXCIMER CURING Public/Granted day:2009-10-22
Information query
IPC分类:
G | 物理 |
G21 | 核物理;核工程 |
G21G | 化学元素的转变;放射源 |
G21G5/00 | 通过化学反应进行化学元素的推断转变 |