发明授权
- 专利标题: Method and apparatus for excimer curing
- 专利标题(中): 准分子固化的方法和装置
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申请号: US12107281申请日: 2008-04-22
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公开(公告)号: US08022377B2公开(公告)日: 2011-09-20
- 发明人: Dmitry Lubomirsky , Muhammad M. Rasheed , Ellie Y. Yieh
- 申请人: Dmitry Lubomirsky , Muhammad M. Rasheed , Ellie Y. Yieh
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Kilpatrick Townsend & Stockton LLP
- 主分类号: G21G5/00
- IPC分类号: G21G5/00
摘要:
An apparatus for An apparatus for generating excimer radiation is provided. The apparatus includes a housing having a housing wall. An electrode is configured within the housing. A tubular body is around the electrode. The tubular body includes an outer wall and an inner wall. At least one inert gas is between the outer wall and the inner wall, wherein the housing wall and the electrode are configured to excite the inert gas to illuminate an excimer light for curing.
公开/授权文献
- US20090261276A1 METHOD AND APPARATUS FOR EXCIMER CURING 公开/授权日:2009-10-22
信息查询
IPC分类:
G | 物理 |
G21 | 核物理;核工程 |
G21G | 化学元素的转变;放射源 |
G21G5/00 | 通过化学反应进行化学元素的推断转变 |