发明授权
- 专利标题： Mirror device
- 专利标题（中）： 镜像设备
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申请号： US12220501申请日： 2008-07-25
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公开(公告)号： US08023172B2公开(公告)日： 2011-09-20
- 发明人: Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Naoya Sugimoto
- 申请人： Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Naoya Sugimoto
- 申请人地址： JP JP
- 专利权人： Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人： Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人地址： JP JP
- 代理商 Bo-In Lin
- 主分类号： G02B26/00
- IPC分类号： G02B26/00 ; G02B26/08
摘要：
A mirror device, comprising: a mirror; an electrode which is placed on a substrate and on which surface a cavity is formed; and a hinge placed between the mirror and electrode, wherein the hinge is connected to the cavity of the electrode.
公开/授权文献
- US20080285111A1 Mirror device 公开/授权日：2008-11-20
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