发明授权
- 专利标题： Device for collecting flux of electromagnetic radiation in the extreme ultraviolet
- 专利标题（中）： 用于收集极紫外线电磁辐射通量的装置
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申请号： US12226038申请日： 2007-04-04
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公开(公告)号： US08023182B2公开(公告)日： 2011-09-20
- 发明人: Roland Geyl , Vincent Patoz , François Riguet , François Dufresne De Virel
- 申请人： Roland Geyl , Vincent Patoz , François Riguet , François Dufresne De Virel
- 申请人地址： FR
- 专利权人： Sagem Defense Securite
- 当前专利权人： Sagem Defense Securite
- 当前专利权人地址： FR
- 代理机构： Kilpatrick Townsend & Stockton LLP
- 代理商 Dean W. Russell; Kristin M. Crall
- 优先权： FR0603116 20060407
- 国际申请： PCT/FR2007/000573 WO 20070404
- 国际公布： WO2007/118993 WO 20071025
- 主分类号： G02B5/08
- IPC分类号： G02B5/08
摘要：
Device for collecting a flux of electromagnetic radiation in the extreme ultraviolet (EUV) emitted by a source, including a main, first collector stage, with a concave collector mirror placed in front of the source at a distance of greater than 250 mm and pierced by a central hole, and a convex mirror placed behind the concave mirror level with the source and pierced by a central hole, and at least a second collector stage with a concave collector mirror placed in front of the stage and pierced by a central hole and a convex mirror placed behind the concave mirror.
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