发明授权
US08028427B2 Apparatus and method for positioning a workpiece 有权
用于定位工件的装置和方法

  • 专利标题: Apparatus and method for positioning a workpiece
  • 专利标题(中): 用于定位工件的装置和方法
  • 申请号: US12594106
    申请日: 2008-03-28
  • 公开(公告)号: US08028427B2
    公开(公告)日: 2011-10-04
  • 发明人: Stephen J. Morris
  • 申请人: Stephen J. Morris
  • 申请人地址: GB Wrexham, Clwyd
  • 专利权人: Nightingale-EOD Ltd.
  • 当前专利权人: Nightingale-EOD Ltd.
  • 当前专利权人地址: GB Wrexham, Clwyd
  • 代理机构: Bingham McCutchen LLP
  • 优先权: GB0706314.2 20070330
  • 国际申请: PCT/GB2008/001134 WO 20080328
  • 国际公布: WO2008/119982 WO 20081009
  • 主分类号: G01B11/27
  • IPC分类号: G01B11/27
Apparatus and method for positioning a workpiece
摘要:
A stage for aligning a workpiece relative to analyzing apparatus. The stage has a platform and means for maintaining a workpiece on the platform. The platform is operable to tilt relative to the analyzing apparatus and thereby rotate the workpiece relative to the analyzing apparatus.
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