Invention Grant
US08030628B2 Pulse modifier, lithographic apparatus and device manufacturing method 有权
脉冲调制器,光刻设备和器件制造方法

Pulse modifier, lithographic apparatus and device manufacturing method
Abstract:
A pulse modifier, and associated lithographic apparatus and a method for manufacturing a device, is disclosed. The pulse modifier is configured to receive an input pulse of radiation and further configured to emit a plurality of corresponding output pulse portions of radiation, wherein the respective pulse portions are respectively mirrored about an axis transverse to the optical axis and mirrored about a point of the optical axis of the pulse portions.
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