发明授权
- 专利标题： Device for holding a template for use in imprint lithography
- 专利标题（中）： 用于保存用于压印光刻的模板的装置
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申请号： US12715915申请日： 2010-03-02
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公开(公告)号： US08033814B2公开(公告)日： 2011-10-11
- 发明人: Todd C. Bailey , Byung-Jin Choi , Matthew E. Colburn , Sidlgata V. Sreenivasan , Carlton Grant Willson , John G. Ekerdt
- 申请人： Todd C. Bailey , Byung-Jin Choi , Matthew E. Colburn , Sidlgata V. Sreenivasan , Carlton Grant Willson , John G. Ekerdt
- 申请人地址： US TX Austin
- 专利权人： Board of Regents, The University of Texas System
- 当前专利权人： Board of Regents, The University of Texas System
- 当前专利权人地址： US TX Austin
- 代理商 Cameron A. King
- 主分类号： B29C59/02
- IPC分类号： B29C59/02
摘要：
An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and an actuator system coupled to the body. The actuator system may be configured to alter a physical dimension of the template during use.
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