发明授权
- 专利标题： Contamination-inspecting apparatus and detection circuit
- 专利标题（中）： 污染检查装置和检测电路
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申请号： US12116241申请日： 2008-05-07
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公开(公告)号： US08035071B2公开(公告)日： 2011-10-11
- 发明人: Masami Makuuchi , Ritsurou Orihashi , Masayoshi Takahashi , Wen Li , Kengo Imagawa , Takahiro Jingu
- 申请人： Masami Makuuchi , Ritsurou Orihashi , Masayoshi Takahashi , Wen Li , Kengo Imagawa , Takahiro Jingu
- 申请人地址： JP Tokyo
- 专利权人： Hitachi High-Technologies Corporation
- 当前专利权人： Hitachi High-Technologies Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Antonelli, Terry, Stout & Kraus, LLP.
- 优先权： JP2007-124082 20070509
- 主分类号： G01N21/88
- IPC分类号： G01N21/88
摘要：
The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.
公开/授权文献
- US20080278717A1 CONTAMINATION-INSPECTING APPARATUS AND DETECTION CIRCUIT 公开/授权日：2008-11-13
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