发明授权
- 专利标题: Phase changeable memory cell array region and method of forming the same
- 专利标题(中): 相变存储单元阵列区域及其形成方法
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申请号: US12617782申请日: 2009-11-13
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公开(公告)号: US08039298B2公开(公告)日: 2011-10-18
- 发明人: Hyeong-Geun An , Hideki Horii , Sang-Yeol Kang
- 申请人: Hyeong-Geun An , Hideki Horii , Sang-Yeol Kang
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2005-0108797 20051114
- 主分类号: H01L21/06
- IPC分类号: H01L21/06 ; H01L21/00 ; G11C11/00
摘要:
A phase changeable memory cell array region includes a lower interlayer insulating layer disposed on a semiconductor substrate. The region also includes a plurality of conductive plugs disposed through the lower interlayer insulating layer. The region also includes a phase changeable material pattern operably disposed on the lower interlayer insulating layer, the phase changeable pattern covering at least two of the plurality of conductive plugs, wherein the phase changeable material pattern includes a plurality of first regions in contact with one or more of the plurality of conductive plugs and at least one second region interposed between the plurality of the first regions, wherein the at least one second region has a lower thermal conductivity than the plurality of first regions. The phase changeable memory cell array region also includes an upper interlayer insulating layer covering at least one of the phase changeable material pattern and the lower interlayer insulating layer. The region also includes conductive patterns disposed through the upper interlayer insulating layer and electrically connected to a plurality of predetermined regions of the plurality of first regions.
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