发明授权
- 专利标题: Image sensor and method of fabricating the same
- 专利标题(中): 图像传感器及其制造方法
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申请号: US12258415申请日: 2008-10-26
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公开(公告)号: US08039324B2公开(公告)日: 2011-10-18
- 发明人: Hee-Sung Shim
- 申请人: Hee-Sung Shim
- 申请人地址: KR Seoul
- 专利权人: Dongbu HiTek Co., Ltd.
- 当前专利权人: Dongbu HiTek Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Sherr & Vaughn, PLLC
- 优先权: KR10-2007-0118338 20071120
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
An image sensor includes a semiconductor substrate, a photodiode formed in the semiconductor substrate, a first impurity region formed in the semiconductor substrate spaced from the photodiode, a second impurity region formed in the semiconductor substrate spaced from the first impurity region, a first gate formed over the semiconductor substrate between the photodiode and the first impurity region, a second gate formed over the semiconductor substrate between the first impurity region and the second impurity region, a spacer formed over the fourth impurity region and a first sidewall of the second gate, and an insulating film formed over the photodiode, the first gate, the first impurity region and a second sidewall and a portion of the uppermost surface of the second gate.
公开/授权文献
- US20090127598A1 IMAGE SENSOR AND METHOD OF FABRICATING THE SAME 公开/授权日:2009-05-21
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