发明授权
- 专利标题: Electron source
- 专利标题(中): 电子源
-
申请号: US12667762申请日: 2008-06-19
-
公开(公告)号: US08040034B2公开(公告)日: 2011-10-18
- 发明人: Ryozo Nonogaki , Yoshinori Terui
- 申请人: Ryozo Nonogaki , Yoshinori Terui
- 申请人地址: JP Tokyo
- 专利权人: Denki Kagaku Kogyo Kabushiki Kaisha
- 当前专利权人: Denki Kagaku Kogyo Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-183452 20070712
- 国际申请: PCT/JP2008/061233 WO 20080619
- 国际公布: WO2009/008254 WO 20090115
- 主分类号: H01J1/16
- IPC分类号: H01J1/16
摘要:
An electron source producing an electron beam which is highly reliable and stable even when it is externally oscillated. The electron source comprises a cathode (1) having an electron emitting section which is so connected to be interposed between top ends of two filaments (3) which are respectively connected to two conductive pins (4) provided on an insulator member (5), an end of the cathode (1) which differs from the electron emitting section being fixed to the insulator member (5), wherein the two filaments (3) are being twofold symmetry with a center on a center axis of the cathode (1), and preferably, the end of the cathode (1) which differs from the electron emitting section is fixed to the insulator member (5) via a metallic member (6) brazed to the insulator member, and more preferably, a curved portion is provided to the filaments.
公开/授权文献
- US20100194262A1 ELECTRON SOURCE 公开/授权日:2010-08-05
信息查询