发明授权
US08040761B2 Near-field light generating device including near-field light generating element disposed over waveguide with buffer layer and adhesion layer therebetween 有权
近场光产生装置包括设置在波导上的缓冲层和其间的粘附层的近场光产生元件

Near-field light generating device including near-field light generating element disposed over waveguide with buffer layer and adhesion layer therebetween
摘要:
A near-field light generating device includes: a waveguide; a buffer layer disposed on the top surface of the waveguide; an adhesion layer that is formed by incompletely oxidizing a metal layer and disposed on the buffer layer; and a near-field light generating element disposed on the adhesion layer. The adhesion layer has a resistance-area product higher than that of the metal layer unoxidized and lower than that of a layer that is formed by completely oxidizing the metal layer. A layered structure consisting of the buffer layer, the adhesion layer and the near-field light generating element has a peel-test adhesive strength higher than that of a layered structure consisting of the buffer layer and the near-field light generating element.
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