发明授权
US08042394B2 High sensitivity microelectromechanical sensor with rotary driving motion
有权
具有旋转驱动运动的高灵敏度微机电传感器
- 专利标题: High sensitivity microelectromechanical sensor with rotary driving motion
- 专利标题(中): 具有旋转驱动运动的高灵敏度微机电传感器
-
申请号: US12208977申请日: 2008-09-11
-
公开(公告)号: US08042394B2公开(公告)日: 2011-10-25
- 发明人: Luca Coronato , Alessandro Balzelli Ludovico , Sarah Zerbini
- 申请人: Luca Coronato , Alessandro Balzelli Ludovico , Sarah Zerbini
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed IP Law Group PLLC
- 代理商 Lisa K. Jorgenson; Robert Iannucci
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector.
公开/授权文献
信息查询