Invention Grant
- Patent Title: Method of making microminiature moving device
- Patent Title (中): 制作微型移动装置的方法
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Application No.: US12315652Application Date: 2008-12-05
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Publication No.: US08043882B2Publication Date: 2011-10-25
- Inventor: Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
- Applicant: Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
- Applicant Address: JP Tokyo
- Assignee: Japan Aviation Electronics Industry Limited
- Current Assignee: Japan Aviation Electronics Industry Limited
- Current Assignee Address: JP Tokyo
- Agent David N. Lathrop
- Priority: JP2004-059495 20040303; JP2005-010514 20050118
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.
Public/Granted literature
- US20090181487A1 Method of making microminiature moving device Public/Granted day:2009-07-16
Information query
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