Invention Grant
US08043882B2 Method of making microminiature moving device 有权
制作微型移动装置的方法

Method of making microminiature moving device
Abstract:
A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.
Public/Granted literature
Information query
Patent Agency Ranking
0/0