Invention Grant
- Patent Title: Light scattering property measurement method
- Patent Title (中): 光散射特性测量方法
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Application No.: US12326783Application Date: 2008-12-02
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Publication No.: US08045170B2Publication Date: 2011-10-25
- Inventor: Stephen James Hardy , DeQiang Eugene Cai
- Applicant: Stephen James Hardy , DeQiang Eugene Cai
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: AU2007237364 20071205; AU2007254594 20071220
- Main IPC: G01N21/55
- IPC: G01N21/55

Abstract:
Methods (300, 1000) of determining a light scattering property of a medium (152), are disclosed. The medium (152) is illuminated through a test pattern (e.g., 155, 510), the test pattern (155, 510) comprising at least one region containing a first pattern with substantial variation in two orthogonal directions at one scale. The test pattern (300, 1000) further comprises at least one other region containing the first pattern at a different scale. The light reflected from the illuminated medium (152) through the test pattern is measured to capture an image of the illuminated medium. A light scattering property of the medium (152) is determined based on the measured light.
Public/Granted literature
- US20090148175A1 LIGHT SCATTERING PROPERTY MEASUREMENT METHOD Public/Granted day:2009-06-11
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