发明授权
US08047817B2 Cleaning method of a rotary piston vacuum pump 有权
旋转活塞真空泵的清洗方法

  • 专利标题: Cleaning method of a rotary piston vacuum pump
  • 专利标题(中): 旋转活塞真空泵的清洗方法
  • 申请号: US10573682
    申请日: 2004-09-20
  • 公开(公告)号: US08047817B2
    公开(公告)日: 2011-11-01
  • 发明人: David Paul MansonKristian Laskey
  • 申请人: David Paul MansonKristian Laskey
  • 申请人地址: GB Crawley, West Sussex
  • 专利权人: Edwards Limited
  • 当前专利权人: Edwards Limited
  • 当前专利权人地址: GB Crawley, West Sussex
  • 优先权: GB0322238.7 20030923; GB0409568.3 20040429
  • 国际申请: PCT/GB2004/004009 WO 20040920
  • 国际公布: WO2005/028871 WO 20050331
  • 主分类号: F04B53/00
  • IPC分类号: F04B53/00
Cleaning method of a rotary piston vacuum pump
摘要:
A method for managing deposits within a pump mechanism (81) is provided. Fluid suitable for dissolving, diluting or otherwise disengaging deposits which have accumulated on the internal working surfaces of the pump is brought into contact with the mechanism. The performance of the pump is monitored and this data is used together with process data received from, or associated with, a tool (83) being evacuated by the pump to calculate (80) fluid flow characteristics which are required to compensate for the accumulation of deposits on the internal working surfaces of the pump. Fluid is then introduced (2, 84) into the pumping mechanism in accordance with the calculated fluid flow characteristics.
公开/授权文献
信息查询
0/0