发明授权
- 专利标题: Metering and vaporizing particulate material
- 专利标题(中): 计量和蒸发颗粒材料
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申请号: US12271277申请日: 2008-11-14
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公开(公告)号: US08048230B2公开(公告)日: 2011-11-01
- 发明人: Michael Long , Thomas W. Palone
- 申请人: Michael Long , Thomas W. Palone
- 申请人地址: US VA Herndon
- 专利权人: Global OLED Technology LLC
- 当前专利权人: Global OLED Technology LLC
- 当前专利权人地址: US VA Herndon
- 代理机构: Morgan, Lewis & Bockius LLP
- 主分类号: C23C16/448
- IPC分类号: C23C16/448 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22
摘要:
Apparatus for metering and vaporizing a particulate material, includes: a metering device for metering particulate material having: a reservoir for receiving particulate material; a housing having first and second openings; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove; a rotating agitator with a plurality of tines disposed in the reservoir and cooperating with the rotating shaft for fluidizing particulate material and transporting it from the reservoir into the groove; cooperating such that particulate material is transported by the groove; a scraper cooperates with the groove to dislodge particulate material retained therein, and deliver metered amounts of particulate material through the second opening; a structure fluidizes the particulate material at the second opening; and a flash evaporator that receives and flash vaporizes the metered particulate material.
公开/授权文献
- US20100122659A1 METERING AND VAPORIZING PARTICULATE MATERIAL 公开/授权日:2010-05-20
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