Invention Grant
- Patent Title: Time-of-flight segmented Faraday
- Patent Title (中): 飞行时间分段法拉第
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Application No.: US12618115Application Date: 2009-11-13
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Publication No.: US08049168B2Publication Date: 2011-11-01
- Inventor: Frank Sinclair
- Applicant: Frank Sinclair
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J49/00
- IPC: H01J49/00
Abstract:
This measurement device is used to determine energy for charged particles. The measurement device includes two segments and a plate that define two thresholds or gaps. The current as a charged particle passes through these thresholds or gaps is measured. The measurement device then calculates the energy of the charged particles. Energy contamination also may be determined.
Public/Granted literature
- US20100155593A1 TIME-OF-FLIGHT SEGMENTED FARADAY Public/Granted day:2010-06-24
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