Invention Grant
US08049291B2 Semiconductor optical sensor having an inter-region light-shielding plug
有权
具有区域间隔离插头的半导体光学传感器
- Patent Title: Semiconductor optical sensor having an inter-region light-shielding plug
- Patent Title (中): 具有区域间隔离插头的半导体光学传感器
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Application No.: US12048239Application Date: 2008-03-14
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Publication No.: US08049291B2Publication Date: 2011-11-01
- Inventor: Masao Okihara
- Applicant: Masao Okihara
- Applicant Address: JP Tokyo
- Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Volentine & Whitt, PLLC
- Priority: JP2007-089298 20070329
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A sensor includes a substrate provided with a circuit element forming region and a photodiode forming region, the substrate having a silicon substrate, an insulating layer on the silicon substrate, and a silicon layer on the insulating layer; a photodiode in the silicon layer; a circuit element in the silicon layer; a first interlayer insulating film formed over the silicon layer; a first light-shielding film on the first interlayer film and having an opening in the photodiode forming region; and a first inter-region light-shielding plug arranged between the two regions, for connecting the silicon substrate and the first light-shielding film.
Public/Granted literature
- US20080237769A1 SEMICONDUCTOR OPTICAL SENSOR Public/Granted day:2008-10-02
Information query
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