Invention Grant
US08049329B2 Wafer stacked package waving bertical heat emission path and method of fabricating the same 有权
晶圆叠层包装挥发热发射路径及其制造方法

Wafer stacked package waving bertical heat emission path and method of fabricating the same
Abstract:
A wafer stacked semiconductor package (WSP) having a vertical heat emission path and a method of fabricating the same are provided. The WSP comprises a substrate on which semiconductor chips are mounted; a plurality of semiconductor chips stacked vertically on the substrate; a cooling through-hole formed vertically in the plurality of semiconductor chips, and sealed; micro holes formed on the circumference of the cooling through-hole; and coolant filling the inside of the cooling through-hole. Accordingly, the WSP reduces a temperature difference between the semiconductor chips and quickly dissipates the heat generated by the stacked semiconductor chips.
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