发明授权
- 专利标题: Probe microscopy and probe position monitoring apparatus
- 专利标题(中): 探头显微镜和探头位置监测仪
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申请号: US12595504申请日: 2008-04-09
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公开(公告)号: US08051493B2公开(公告)日: 2011-11-01
- 发明人: Arturas Ulcinas , John D. Engledew , Michael L. Picco , John M. Miles , Massimo Antognozzi
- 申请人: Arturas Ulcinas , John D. Engledew , Michael L. Picco , John M. Miles , Massimo Antognozzi
- 申请人地址: GB Bristol
- 专利权人: The University of Bristol
- 当前专利权人: The University of Bristol
- 当前专利权人地址: GB Bristol
- 代理机构: Marshall, Gerstein & Borun LLP
- 优先权: GB0706732.5 20070409; GB0712923.2 20070704; GB0718094.6 20070917
- 国际申请: PCT/GB2008/001236 WO 20080409
- 国际公布: WO2008/122800 WO 20081016
- 主分类号: G01N13/16
- IPC分类号: G01N13/16 ; G01B5/28 ; G01Q60/18
摘要:
A method of determining the position of a probe tip. An evanescent electromagnetic field is generated extending beyond an interface boundary between a first medium, having a first refractive index, and a second medium, having a second refractive index which is greater than the first refractive index, the interface boundary extending in a plane. A probe tip is positioned in the evanescent field in the first medium thereby causing propagating electromagnetic radiation to be produced as a result of the disruption of the evanescent field by the probe tip, and at least a portion of the propagating electromagnetic radiation is collected. The spatial intensity distribution of the collected radiation is detected with respect to an image plane. An at least one dimensional position of the probe tip in a probe tip plane is determined from the detected spatial intensity distribution, the probe tip plane being a plane which contains the probe tip and which is substantially parallel to the plane of the interface boundary.
公开/授权文献
- US20100207039A1 Probe Microscopy and Probe Position Monitoring Apparatus 公开/授权日:2010-08-19
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