发明授权
- 专利标题: Semiconductor structure incorporating multiple nitride layers to improve thermal dissipation away from a device and a method of forming the structure
- 专利标题(中): 结合了多个氮化物层以提高远离器件的散热的半导体结构和形成该结构的方法
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申请号: US12638004申请日: 2009-12-15
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公开(公告)号: US08053870B2公开(公告)日: 2011-11-08
- 发明人: Brent A. Anderson , Joseph M. Lukaitis , Jed H. Rankin , Robert R. Robison
- 申请人: Brent A. Anderson , Joseph M. Lukaitis , Jed H. Rankin , Robert R. Robison
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Gibb I.P. Law Firm, LLC
- 代理商 Richard M. Kotulak, Esq.
- 主分类号: H01L23/58
- IPC分类号: H01L23/58
摘要:
Disclosed are embodiments of a semiconductor structure that incorporates multiple nitride layers stacked between the center region of a device and a blanket oxide layer. These nitride layers are more thermally conductive than the blanket oxide layer and, thus provide improved heat dissipation away from the device. Also disclosed are embodiments of a method of forming such a semiconductor structure in conjunction with the formation of any of the following nitride layers during standard processing of other devices: a nitride hardmask layer (OP layer), a “sacrificial” nitride layer (SMT layer), a tensile nitride layer (WN layer) and/or a compressive nitride layer (WP layer). Optionally, the embodiments also incorporate incomplete contacts that extend through the blanket oxide layer into one or more of the nitride layers without contacting the device in order to further improve heat dissipation.