发明授权
- 专利标题: Method and apparatus for manufacturing plate-like structure
- 专利标题(中): 制造板状结构的方法和装置
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申请号: US12552049申请日: 2009-09-01
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公开(公告)号: US08057214B2公开(公告)日: 2011-11-15
- 发明人: Ryoichi Takahashi , Masatoshi Sakurai
- 申请人: Ryoichi Takahashi , Masatoshi Sakurai
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2004-278674 20040927; JP2004-355792 20041208
- 主分类号: B29C59/02
- IPC分类号: B29C59/02
摘要:
A method for manufacturing a plate-like structure, the method including a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper and a press surface of a lower mold, and pressurizing central parts of the upper and lower molds to apply pressure to the master and the transferred substrate, wherein a compressive load imposed on inner peripheral portions of the upper and lower molds is blocked and distributed toward outer peripheries of the upper and lower molds.
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