Invention Grant
US08058115B2 Method of fabricating organic thin film transistor using surface energy control
有权
使用表面能量控制制造有机薄膜晶体管的方法
- Patent Title: Method of fabricating organic thin film transistor using surface energy control
- Patent Title (中): 使用表面能量控制制造有机薄膜晶体管的方法
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Application No.: US12435721Application Date: 2009-05-05
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Publication No.: US08058115B2Publication Date: 2011-11-15
- Inventor: Lee-Mi Do , Kyu-Ha Baek
- Applicant: Lee-Mi Do , Kyu-Ha Baek
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2008-0074124 20080729
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is a method of fabricating an organic thin film transistor (OTFT) using surface energy control. The method changes a polarity of a gate insulating layer to a polarity of a semiconductor channel layer to be formed on the gate insulating layer by controlling surface energy of the gate insulating layer, thereby promoting growth of the semiconductor channel layer on the gate insulating layer. According to the method, the interface characteristics between the gate insulating layer and the semiconductor channel layer are improved, and thus it is possible to implement an OTFT that can minimize leakage current and has high field effect mobility and low turn-on voltage.
Public/Granted literature
- US20100029049A1 METHOD OF FABRICATING ORGANIC THIN FILM TRANSISTOR USING SURFACE ENERGY CONTROL Public/Granted day:2010-02-04
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