发明授权
US08058115B2 Method of fabricating organic thin film transistor using surface energy control
有权
使用表面能量控制制造有机薄膜晶体管的方法
- 专利标题: Method of fabricating organic thin film transistor using surface energy control
- 专利标题(中): 使用表面能量控制制造有机薄膜晶体管的方法
-
申请号: US12435721申请日: 2009-05-05
-
公开(公告)号: US08058115B2公开(公告)日: 2011-11-15
- 发明人: Lee-Mi Do , Kyu-Ha Baek
- 申请人: Lee-Mi Do , Kyu-Ha Baek
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2008-0074124 20080729
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Provided is a method of fabricating an organic thin film transistor (OTFT) using surface energy control. The method changes a polarity of a gate insulating layer to a polarity of a semiconductor channel layer to be formed on the gate insulating layer by controlling surface energy of the gate insulating layer, thereby promoting growth of the semiconductor channel layer on the gate insulating layer. According to the method, the interface characteristics between the gate insulating layer and the semiconductor channel layer are improved, and thus it is possible to implement an OTFT that can minimize leakage current and has high field effect mobility and low turn-on voltage.
公开/授权文献
信息查询
IPC分类: